Home » 論文ナビSCOPE » キーワード分析 » 【論文データ】MEMSの国内研究動向まとめ 【論文データ】MEMSの国内研究動向まとめ 論文ナビは研究者によって運営される論文解説プラットフォームです。このページでは、最近二年間(2016-2017)で発表された文献データを独自に収集・集計して分かりやすくまとめました。論文キーワードマップ、代表的な研究機関、頻出キーワード、分野のシェア、分野関連図、関連文献等により、今までない情報を提供します。 統計データ MEMSmicrorobotMEMS-CMOS integrationartificial neural networksSMAtactile sensorelectron beam lithographyactuatorpiezoelectricitycantileversingle crystal siliconaccelerometerlead zirconate titanate (PZT)silicon carbide (SiC)diaphragmshape-memory alloysensormillimeter wavevibrationEB lithographyEUV lithographyhydrogen sensorstrainintegrated opticsfractureinfraredCMOSnanowiretensile testaerosol depositionferroelectricstransducerconsolidationhigh-resolutionanodic bondingsurface plasmonmicrofabricationelectromagnetic couplingwireless sensorinduced pluripotent stem (iPS) cellscardiomyocytenatural frequencybifurcationSMEStrenchultrasonic vibrationpressure sensorshear stressclusteringdesignimprintrectifierdielectrophoresisspatial light modulatorholographymicrofluidicswoody biomassfeedback controlcapacitancemetallic glassoptical sensorblood flowhapticspolymerLSImicromachiningintegrated photonicsfatigueresonatorlifetimereliabilitymeltingdifferential scanning calorimetry (DSC)thin filmssputteringelectretInternet of Things (IoT)nonlinearityin situ observationtransmission electron microscopy (TEM)terahertz wavewater (H2O)mechanismopticsX-raysize effectplastic deformationtemperaturerenewable energyenergy harvestingdragonflymechanical propertiesoptogeneticswaveguidefield emissionplasmonpackagingsoft X-raysurface acoustic wavesapphireprobabilistic modelplatinum catalystelectroplatinggas sensorhydrogenscintillatorvacuum evaporationspatial frequencymeasurementferritebiomasscelluloseneural networksilicon (Si)high temperaturereconfigurable optical add/drop multiplexer (ROADM)gesture recognitiongoldfractal
